Handbook of Thin Film Deposition Processes and Techniques

ISBN-10: 0815517785
ISBN-13: 9780815517788
Category: Technology & Engineering
Pages: 430
Language: English
Published: 2001-02-01
Publisher: William Andrew
Author: Krishna Seshan

Description

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Get the book

Similar books

Animal Sciences: The Biology, Care, and Production of Domestic Animals, Fourth Edition
By John R. Campbell, M. Douglas Kenealy, Karen L. Campbell
Timberlake claimed in 1980 that a fundamental problem with Singer's work is the lack of an adequate definition of suffering ...
Resilient Agriculture: Cultivating Food Systems for a Changing Climate
By Laura Lengnick
3. D. Layne. 2013. Tree Fruit: Protecting Your Investment. American/Western Fruit Grower, September/October. 4. R. Snyder and J. Melu-Abreu. 2005. Frost ...
Biodesign: The Process of Innovating Medical Technologies
By Stefanos Zenios, Josh Makower, Paul Yock
At that time, these were in the low $10s of millions. ... be a good partner going forward, even though it takes longer to get the deal done," offered Chess.
Advanced Signal Processing: A Concise Guide
By Amir-Homayoon Najmi, Todd Moon
[ 59 ] S. Kotz , T. J. Kozubowski , and K. Podgorski , The Laplace ... valued signal processing : The proper way to deal with impropriety , ” IEEE Trans .
Resources for Technical Communication
By Pearson Education, Pearson Education Staff, David P Pearson Education
Some documents are annotated; some are left without annotations to provide more flexibility for instructors. This booklet can be packaged at no additional cost with any Longman title in technical communication.
Chemistry: An Introduction to General, Organic, and Biological Chemistry; Chemistry Study Pack Version 2.0 CD-ROM; The Chemistry of Life CD-ROM;...
By Karen C. Timberlake
Chemistry: An Introduction to General, Organic, and Biological Chemistry; Chemistry Study Pack Version 2.0 CD-ROM; The Chemistry of Life CD-ROM;...
Poultry Science: Fifth Edition
By Colin G. Scanes, Karen D. Christensen
The emission rates for ammonia (Casey et al., 2006): • Layers: 116 g NH3 per AU (AU or animal unit or 500 kg). • Broilers: 135 g NH3 per AU (AU or animal unit or 500 kg). Emission rates in different reports vary from less than either 10 ...
Solid State Materials Chemistry
By Patrick M. Woodward, Pavel Karen, John S. O. Evans
[45] B.F. Hoskins, R. Robson, “Design and construction of a new class of scaffolding-like materials comprising infinite polymeric frameworks of 3D-linked molecular rods. A reappraisal of the zinc cyanide and cadmium cyanide structures ...
Abbreviations Dictionary
By Dean A. Stahl, Karen Landen
... Tallest Mountain Mount Robson—12,972 feet or 3,954 meters—in the Canadian Rockies Canada's Westernmost City Dawson, Yukon Canada's Westernmost Point in Yukon Territory just east of Alaska's Demarcation Point Canary Islands' Largest ...
Agriculture: A Very Short Introduction
By Paul Brassley, Richard Soffe
ACCOUNTING Christopher Nobes ADVERTISING Winston Fletcher AFRICAN AMERICAN RELIGION Eddie S. Glaude Jr AFRICAN HISTORY ... Hugh Bowden ALGEBRA Peter M. Higgins AMERICAN HISTORY Paul S. Boyer AMERICAN IMMIGRATION David A. Gerber AMERICAN ...