Microfabrication for Industrial Applications
- ISBN-10
- 081551977X
- ISBN-13
- 9780815519775
- Category
- Technology & Engineering
- Pages
- 312
- Language
- English
- Published
- 2011-08-31
- Publisher
- William Andrew
- Author
- Regina Luttge
Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Get the book
Other editions
Similar books
-
Nano- and Microfabrication for Industrial and Biomedical Applications
By Regina LuttgeIn this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems.
-
Microfluidics and Microfabrication
By Suman ChakrabortyMicrofluidics and Microfabrication discusses the interconnect between microfluidics, microfabrication and the life sciences.
-
3D Laser Microfabrication: Principles and Applications
By Hiroaki Misawa, Saulius JuodkazisThe book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future.
-
Laser Precision Microfabrication
By Koji Sugioka, Michel Meunier, Alberto PiquéThis book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials.
-
Microfabrication and Nanomanufacturing
By Mark J. JacksonMicrofabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry.
-
Three-Dimensional Microfabrication Using Two-Photon Polymerization: Fundamentals, Technology, and Applications
By Tommaso BaldacchiniDespite the increasing importance of TPP microfabrication and its potential for many more application areas, ... 2013, 9780857095008 Luttge, Microfabrication for Industrial Applications, 2011, 9780815515821 William Andrew Applied ...
-
Transport in Laser Microfabrication: Fundamentals and Applications
By Costas P. GrigoropoulosEmphasising the fundamentals of transport phenomena, this book provides researchers and practitioners with the technical background they need to understand laser-induced microfabrication and materials processing at small scales.
-
Smart Sensors and MEMS: Intelligent Sensing Devices and Microsystems for Industrial Applications
By A. Luque, S NihtianovThe book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh ...
-
Laser Precision Microfabrication
By Koji Sugioka, Michel Meunier, Alberto PiquéThis book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials.
-
Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering
By John X J Zhang, Kazunori HoshinoPetersson F, A ̊berg L, Swa ̈rd-Nilsson AM, Laurell T. Free flow acoustophoresis: microfluidic-based mode of particle and cell separation. ... Lenshof A, Ahmad-Tajudin A, Ja ̈ra ̊s K, Swa ̈rd-Nilsson AM, A ̊berg L, Marko-Varga G, et al.