ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II : Proceedings of the Satellite Symposium to ESSDERC 95,...
- ISBN-10
- 1566771226
- ISBN-13
- 9781566771221
- Category
- Semiconductors
- Pages
- 380
- Language
- English
- Published
- 1995
- Publisher
- The Electrochemical Society
- Authors
- Bernd O. Kolbesen, Cor L. Claeys, Peter Stallhofer
Description
Due to the dull shape of the needle the spatial resolution is not high enough to investigate e.g. crystal defects in mc ... 67 , 7168 ( 1990 ) 15 / H. Föll , V. Lehmann , W. Lippik in : " Crystalline Defects and Contamination : Their ...
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