Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes: Joint Proceedings of the Symposia on ALTECH 99, Satellite Symposium...
- ISBN-10
- 1566772397
- ISBN-13
- 9781566772396
- Category
- Semiconductors
- Pages
- 568
- Language
- English
- Published
- 1999
- Publisher
- The Electrochemical Society
- Author
- Bernd O. Kolbesen
Description
cases are silicon crystalline defects due to contamination from both fab process & bare wafer . In the first case , the silicon defects were caused by the " Sadface ” contamination due to wafer fab process . However , in the second case ...
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