SiGe, Ge, and Related Compounds 4: Materials, Processing, and Devices
- ISBN-10
- 1566778255
- ISBN-13
- 9781566778251
- Category
- Germanium compounds
- Pages
- 1034
- Language
- English
- Published
- 2010-10
- Publisher
- The Electrochemical Society
- Author
- D. Harame
Description
Advanced semiconductor technology is depending on innovation and less on "classical" scaling. SiGe, Ge, and Related Compounds has become a key component in the arsenal in improving semiconductor performance. This symposium discusses the technology to form these materials, process them, FET devices incorporating them, Surfaces and Interfaces, Optoelectronic devices, and HBT devices.
