Semiconductor Cleaning Science and Technology 12 (SCST12)
- ISBN-10
- 1607682591
- ISBN-13
- 9781607682592
- Category
- Semiconductors
- Pages
- 345
- Language
- English
- Published
- 2011
- Publisher
- The Electrochemical Society
- Authors
- T. Hattori, J. Ruzyllo, P. Mertens
Description
... Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing”, but its scope and overall objectives remain the same. This issue of ECS Transactions, just like its predecessors, includes a collection of papers ...
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