Ion Implantation

Ion Implantation
ISBN-10
0720417503
ISBN-13
9780720417500
Series
Ion Implantation
Category
Ion implantation
Pages
802
Language
English
Published
1973
Author
Geoffrey Dearnaley

Description

Buehler , M. G. and G. L. Pearson , 1966 , Solid State Electronics 9 , 395 . Bulthuis , K. , 1968 , Physics Letters 27A , 4 , 193 . ... Clark , A. H. and K. E. Manchester , 1968 , Trans . Met . Soc . A.I.M.E. 242 , 1173 .

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