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effects of ion beams on the optical properties of dielectric materials that can be used to fabricate optical waveguides and other related photonic devices. A large span of possibilities exists, depending on ion type and energy.
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics.
New results in the field of ion implantation from the experienced scientists from different countries are presented in this book.
Ion Implantation
"New results in the field of ion implantation from the experienced scientists from different countries are presented in this book.
Ion Implantation: Science and Technology