MEMS Packaging
- ISBN-10
- 0863413358
- ISBN-13
- 9780863413353
- Category
- Technology & Engineering
- Pages
- 310
- Language
- English
- Published
- 2004
- Publisher
- IET
- Author
- Tai-Ran Hsu
Description
This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering.
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