Manufacturing Techniques for Microfabrication and Nanotechnology
- ISBN-10
- 1439895309
- ISBN-13
- 9781439895306
- Category
- Technology & Engineering
- Pages
- 670
- Language
- English
- Published
- 2011-06-13
- Publisher
- CRC Press
- Author
- Marc J. Madou
Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
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Other editions
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- 2011-06-13
- 670 pages
- Paperback
- CRC Press
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