Materials Processing by Cluster Ion Beams: History, Technology, and Applications

ISBN-10: 1498711766
ISBN-13: 9781498711760
Category: Science
Pages: 260
Language: English
Published: 2015-08-20
Publisher: CRC Press
Author: Isao Yamada

Description

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f

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Materials Processing by Cluster Ion Beams: History, Technology, and Applications
- 2015-08-19
- - pages
- Paperback
- CRC Press

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