Electrochemical Processing in ULSI and MEMS 3

Electrochemical Processing in ULSI and MEMS 3
ISBN-10
1566775868
ISBN-13
9781566775861
Category
Science
Pages
288
Language
English
Published
2007-09
Publisher
The Electrochemical Society
Author
John O. Dukovic

Description

The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.

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