MEMS: A Practical Guide of Design, Analysis, and Applications
- ISBN-10
- 3540336559
- ISBN-13
- 9783540336556
- Series
- MEMS
- Category
- Technology & Engineering
- Pages
- 965
- Language
- English
- Published
- 2010-05-28
- Publisher
- Springer Science & Business Media
- Authors
- Jan Korvink, Oliver Paul
Description
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
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Other editions
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- 2019-03-30
- 965 pages
- Paperback
- Springer
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