Mems
- ISBN-10
- 0070634459
- ISBN-13
- 9780070634459
- Series
- MEMS
- Category
- Microelectromechanical systems
- Pages
- 500
- Language
- English
- Published
- 2008-02-07
- Publisher
- Tata McGraw-Hill Education
- Author
- Mahalik N P
Description
MEMS are small and integrated devices, which combine electronics, electrical as well as mechanical elements to meet the control related functional requirements. This book synergistically covers the aspects of multidisciplinary subjects by providing the proof-of-principle, concepts, design, development and applications of MEMS.
Get the book
Other editions
-
- 2019-03-30
- 965 pages
- Paperback
- Springer
-
- 2010-05-28
- 965 pages
- Ebook
- Springer Science & Business Media
Similar books
-
MEMS和微系统: 设计与制造
By 徐泰然本书提供了对MEMS技术基础的深入观察,涉及MEMS的力学、物理和材料科学基础,讲解了微系统工程的基本原理,列举了MEMS及其在制造、通信、生物工程、运输和其他领域的应用。
-
Microfabricated Systems and MEMS VI: Proceedings of the International Symposium
By Peter J. Hesketh3 ) Richardson , J. , Hawkins , P. and Luxton , R. , “ The use of coated paramagnetic particles as a physical label in a magneto - immunoassay " , Biosensors & Bioelectronics , vol.16 , ( no.9-12 ) , Elsevier ( 2001 ) .
-
Small Tech 101: An Introduction to Micro and Nanotechnology
By Small Times Media LLC.This easy to understand 48-page publication explains how these technologies work and examines commercial applications.
-
Foundations of MEMS
By Chang LiuFoundations of MEMS
-
Micro Electro Mechanical Systems (Mems): Technology, Fabrication Processes, and Applications
By Britt EkwallMicro Electro Mechanical Systems (Mems): Technology, Fabrication Processes, and Applications
-
Micro- and Nanotechnology Sensors, Systems, and Applications IV
By Thomas George, M.Saif Islam, Achyut DuttaIncludes Proceedings Vol. 7821
-
Micro- and Nanotechnology Sensors, Systems, and Applications III: 25-29 April 2011, Orlando, Florida, United States
By M. Saiful Islam, Achyut K. Dutta, Thomas GeorgeIncludes Proceedings Vol. 7821
-
Micro- and Nanotechnology Sensors, Systems, and Applications II: 5-9 April 2010, Orlando, Florida, United States
By M. Saiful Islam, Achyut K. Dutta, Thomas GeorgeThese books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
-
Micro- and Nanotechnology Sensors, Systems, and Applications VII
By M. Saiful Islam, Achyut K. Dutta, Thomas GeorgeThese books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
-
Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gösele
By C. Colinge... Metals, Metal Data Book, p20, Maruzen, Japan (1993). 12. E. A. Brandes G. B. Brook, Smithells Metals Reference Book, 7th Edition, Table 8.8e, Butterworth-Heinemann, Oxford (1992). 10.1149/1.3483495 ©The Electrochemical Society Cu-Sn ...