Papers from the International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (BANPIS '97): 26-27 January 1997, Nanki...
- ISBN-10
- 1563967693
- ISBN-13
- 9781563967696
- Category
- Microelectronics
- Pages
- 171
- Language
- English
- Published
- 1998-01-01
- Authors
- Ōyō Butsuri Gakkai, American Vacuum Society
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