Microelectronics Technology and Devices--SBMICRO 2007
- ISBN-10
- 1566775655
- ISBN-13
- 9781566775656
- Category
- Microelectronics
- Pages
- 599
- Language
- English
- Published
- 2007-01-01
- Publisher
- The Electrochemical Society
- Author
- João Antonio Martino
Description
The SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.
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