Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- ISBN-10
- 1566771889
- ISBN-13
- 9781566771887
- Category
- Semiconductor wafers
- Pages
- 668
- Language
- English
- Published
- 1998
- Publisher
- The Electrochemical Society
- Author
- Jerzy Rużyłło
Description
... surface states on metallic removal efficiency , wafers were contaminated by dipping in dilute HF solutions which had ... conditioning in 10 ppb Cu containing 50 : 1 dilute HF solutions for 30 min were measured by a TXRF technique . For ...
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