Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV, DECON 2005 : Proceedings of the Satellite Symposium...
- ISBN-10
- 1566774284
- ISBN-13
- 9781566774284
- Category
- Science
- Pages
- 202
- Language
- English
- Published
- 2005
- Publisher
- The Electrochemical Society
- Author
- Bernd O. Kolbesen
Get the book
Other editions
-
- 2001
- 362 pages
- Paperback
- The Electrochemical Society
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