Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing III : DECON 2001 : Proceedings of the Satellite...

Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing III : DECON 2001 : Proceedings of the Satellite...
ISBN-10
1566773636
ISBN-13
9781566773638
Category
Crystals
Pages
362
Language
English
Published
2001
Publisher
The Electrochemical Society
Authors
Bernd O. Kolbesen, Electrochemical Society. Electronics Division

Description

[ 15 ] E. Dornberger , E. Tomzig , A. Seidl , S. Schmitt , H.-J. Leister , Ch . Schmitt , G. Müller , J. Cryst . Growth 180 ( 1997 ) 461 . [ 16 ] E. Dornberger , J. Esfandyari , D. Gräf , J. Vanhellemont , Lambert , F. Dupret , W v .

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