Ion Implantation
- ISBN-10
- 9535106341
- ISBN-13
- 9789535106340
- Series
- Ion Implantation
- Category
- Science
- Pages
- 450
- Language
- English
- Published
- 2012-05-30
- Publisher
- BoD – Books on Demand
- Author
- Mark Goorsky
Description
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
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Other editions
-
- 2018-09
- 334 pages
- Paperback
- Nova Science Publishers
-
- 2013-11-27
- 393 pages
- Ebook
- Springer Science & Business Media
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