Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students.
The MEMS/NEMS HANDBOOK consists of five volumes and will provide a significant and uniquely comprehensive reference source for research workers, practitioners, computer scientists, students, technologists and others on the international ...
Foundations of MEMS
The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms.
This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Gabriel Rebeiz offers expert tips for designers and presents a range of real-world applications.
7.6 ELECTROKINETIC SYSTEMS Electrokinetics is the science that " drives ” fluids in most microfluidic networks . It is a science that involves the merger of the subsets of advection , diffusion and electromigration .
Hall effect based on the Lorentz force states that the resistance of the material is mostly dependent on the magnetic flux density B as presented in the following systems . 8.5 MORE ON HALL EFFECT The principle of operation of Hall ...
MEMS. Gyroscopes. In this chapter, we discuss the electrical design issues in a generic micro-electromechanical vibratory system to realize the complete gyroscopic system. First, the fundamentals of electrostatic actuation and ...
The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered.
The MEMS and solder balls contact the electrical feedthrough of the package, and the solder balls are melted to form the electrical and mechanical connection. ... Lau JH, Lee CK, Premachandran CS, Aibin Y (2010) Advanced MEMS packaging.