Micro- and Nanotechnology Sensors, Systems, and Applications III: 25-29 April 2011, Orlando, Florida, United States
- ISBN-10
- 0819486051
- ISBN-13
- 9780819486059
- Category
- Microelectromechanical systems
- Pages
- 868
- Language
- English
- Published
- 2011
- Publisher
- SPIE-International Society for Optical Engineering
- Authors
- M. Saiful Islam, Achyut K. Dutta, Thomas George
Description
Includes Proceedings Vol. 7821
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