MEMS和微系统: 设计与制造
- ISBN-10
- 7111132262
- ISBN-13
- 9787111132264
- Category
- Microelectromechanical systems
- Pages
- 402
- Language
- Chinese
- Published
- 2004
- Author
- 徐泰然
Description
本书提供了对MEMS技术基础的深入观察,涉及MEMS的力学、物理和材料科学基础,讲解了微系统工程的基本原理,列举了MEMS及其在制造、通信、生物工程、运输和其他领域的应用。
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